| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable capacitance type acceleration sensor allowing the boundary part between an upper layer support part and a lower layer support part not to be damaged even under large acceleration. <P>SOLUTION: A capacitance type acceleration sensor comprises a substrate 101, stationary electrodes 121 and 122, a movable electrode 105 arranged opposite to the top faces of the stationary electrodes 121 and 122, and an elastic support part 180 which elastically supports the movable electrode 105 on the substrate 101, such that the movable electrode 105 is displaceable in a direction perpendicular to the top face of the substrate 101. The elastic support part 180 has lower layer support parts 121 and 122 each formed of an insulator fixed to the substrate 101, an upper layer support part 117 fixed on the lower layer support parts 121 and 122, and a beam part 106 which has a long shape along the top face of the substrate 101 with one end connected to the upper layer support part 117 and another end connected to the movable electrode 105. The lower layer support parts 121 and 122 has a gap part 130 at a portion immediately below the coupling portion of the beam part 106 and the upper layer support part 117. <P>COPYRIGHT: (C)2012,JPO&INPIT |
