发明名称 VIBRATION PIECE, VIBRATOR, OSCILLATOR AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration piece which can reduce loss of thermoelasticity on the root side of a vibration arm and can minimize lowering of Q value, and to provide a vibrator equipped with the vibration piece, an oscillator, and an electronic apparatus. <P>SOLUTION: A crystal vibration piece 1 comprises a base 10, and vibration arms 11a, 11b, 11c extending from the base 10 in the Y axis direction. The vibration arms 11a, 11b, 11c have an arm width W in the X axis direction orthogonal to the Y axis direction, in the plan view. On the principal surfaces 10a, 10b of the vibration arms 11a, 11b, 11c facing a plane (XY plane) specified by the Y axis direction and the X axis direction, excitation electrodes 13a, 13b, 13c, 14a, 14b, 14c for vibrating the vibration arms 11a, 11b, 11c in the Z axis direction orthogonal to the Y axis direction and the X axis direction are provided. The arm width W in the X axis direction of the vibration arms 11a, 11b, 11c becomes thinner from the route side toward the tip side of the vibration arms 11a, 11b, 11c. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012182610(A) 申请公布日期 2012.09.20
申请号 JP20110043595 申请日期 2011.03.01
申请人 SEIKO EPSON CORP 发明人 FURUHATA MAKOTO
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/22;H03B5/32;H03H9/215 主分类号 H03H9/19
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