| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit film formation inside of a vacuum gauge. <P>SOLUTION: A vacuum gauge system comprises: a cold cathode ionization gauge 1 which is attached to a vacuum processing device via a valve 2 and measures pressure inside of the vacuum processing device; a first control apparatus 21 for performing opening/closing control of the valve 2; and a second control apparatus 22 which is connected with the cold cathode ionization gauge 1 via a communication line and power supply cable, and is also connected via a signal line with the first control apparatus 21 which transmits opening/closing control signals for the valve 2 to the second control apparatus. The vacuum gauge system is configured to execute measurement when the valve 2 is in an opened state and the cold cathode ionization gauge 1 starts discharging electricity, and to terminate measurement when the valve 2 is in a closed state and the cold cathode ionization gauge 1 stops discharging electricity. <P>COPYRIGHT: (C)2012,JPO&INPIT |
