发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a semiconductor device manufacturing method is disclosed. The method comprises (a) forming cut grooves in a front surface of a semiconductor wafer on which semiconductor elements are formed to partition the front surface into a plurality of regions, (b) disposing partly a resin in the cut grooves, (c) adhering a protection tape on the front surface of the semiconductor wafer, (d) thinning the semiconductor wafer by grinding a rear surface of the semiconductor wafer to reach the cut grooves, (e) forming an adhesive agent layer on the rear surface of the semiconductor wafer, and (f) dividing the semiconductor wafer into a plurality of semiconductor chips by cutting the adhesive agent layer together with the disposed resin along the cut grooves.
申请公布号 US2012235282(A1) 申请公布日期 2012.09.20
申请号 US201213372962 申请日期 2012.02.14
申请人 TOMONO AKIRA;KUROSAWA TETSUYA;FUJITA TSUTOMU;KIRITANI MIKA;TAKYU SHINYA;KABUSHIKI KAISHA TOSHIBA 发明人 TOMONO AKIRA;KUROSAWA TETSUYA;FUJITA TSUTOMU;KIRITANI MIKA;TAKYU SHINYA
分类号 H01L21/78;H01L23/00 主分类号 H01L21/78
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