发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 According to one embodiment, a semiconductor device includes a substrate, a first stacked body, a memory film, a first channel body, a second stacked body, a gate insulating film and a second channel body. A step part is formed between a side face of the select gate and the second insulating layer. A film thickness of a portion covering the step part of the second channel body is thicker than a film thickness of a portion provided between the second insulating layers of the second channel body.
申请公布号 US2012235221(A1) 申请公布日期 2012.09.20
申请号 US201113236723 申请日期 2011.09.20
申请人 ISHIDUKI MEGUMI;KATSUMATA RYOTA;OHSAWA TOMO;SATO MITSURU;KIDOH MASARU;TANAKA HIROYASU;KABUSHIKI KAISHA TOSHIBA 发明人 ISHIDUKI MEGUMI;KATSUMATA RYOTA;OHSAWA TOMO;SATO MITSURU;KIDOH MASARU;TANAKA HIROYASU
分类号 H01L29/792;H01L21/425 主分类号 H01L29/792
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