| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an edge detecting device for properly detecting the outer peripheral edge of a transparent plate-like object. <P>SOLUTION: The edge detecting device detects an edge of the transparent plate-like object having a first face and a second face opposite the first face. The edge detecting device includes: a support having a supporting face smaller than the transparent plate-like object for supporting the transparent plate-like object on its first face side; a light source disposed below the supporting face for emitting light toward the first face of the transparent plate-like object supported by the support; a mask part disposed between the light source and the supporting face for shielding the light emitted to the outer peripheral edge of the transparent plate-like object by the light source, and having an opening smaller than the transparent plate-like object surrounding the support so that part of the light emitted by the light source is emitted therethrough to the transparent plate-like object; an image pick-up means disposed facing the supporting face for capturing the image of the transparent plate-like object on its second face side to which the light is emitted by the light source, and a control means having an edge detecting part for detecting the outer peripheral edge of the transparent plate-like object on the basis of the image captured by the image pick-up means. <P>COPYRIGHT: (C)2012,JPO&INPIT |
