发明名称 |
COATING, AND METHOD AND DEVICE FOR COATING |
摘要 |
The invention relates to a method and a device for applying a coating to a substrate (20), wherein a plasma jet (2) of a low-temperature plasma is produced by conducting a working gas (3) through an excitation zone. The plasma jet is directed at the substrate (20), and plate-shaped particles (10) having an average thickness (H) between 10 and 50,000 nanometers and a shape factor (F) in a value range from 10 to 2000 are fed into the plasma jet (2). The plate-shaped particles are fed into the plasma jet (2) by means of a carrier gas (14). The plasma jet (2) is produced by exciting the working gas (3) by means of an alternating voltage or a pulsed direct voltage. |
申请公布号 |
WO2012123530(A1) |
申请公布日期 |
2012.09.20 |
申请号 |
WO2012EP54530 |
申请日期 |
2012.03.15 |
申请人 |
REINHAUSEN PLASMA GMBH;ECKART GMBH;BISGES, MICHAEL;WOLFRUM, CHRISTIAN;GREB, MARCO;RUPPRECHT, MARKUS |
发明人 |
BISGES, MICHAEL;WOLFRUM, CHRISTIAN;GREB, MARCO;RUPPRECHT, MARKUS |
分类号 |
C23C4/12;B05B7/22;C23C8/36;H05H1/26 |
主分类号 |
C23C4/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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