SUBSTRATE PROCESSING APPARATUS AND POWER SOURCE MANAGEMENT METHOD

摘要

Provided is a substrate processing apparatus (1) which includes: a plurality of units for carrying out steps for processing a substrate; a plurality of ON/OFF switching devices (22) which correspond to the plurality of units, respectively, and switch between an ON state where power is supplied to a corresponding unit and an OFF state where power supply to the corresponding unit is halted; and a control device (6) which acquires production information including the processing details and end time limit for a substrate entered into the substrate processing apparatus (1), uses the production information to create a time chart, which indicates an operation scheme for the plurality of units, in such a way that all of the steps carried out by the plurality of units according to the processing details are completed by the end time limit, and operates the plurality of units according to the time chart and also controls the plurality of ON/OFF switching devices (22) according to the time chart.