GAS MANIFOLD, MODULE FOR LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a gas manifold in which measures are taken to stabilize a gas flow provided between at least two parallel plates of an optical component of a lithographic apparatus.

SOLUTION: A gas manifold to direct a gas flow between two parallel plates of an optical component of a lithographic apparatus has: an inlet to provide a gas flow to the gas manifold; a lattice comprising a plurality of through holes in a regular periodic structure to homogenize the gas flow; a contractor downstream of the lattice to reduce the cross sectional area through which the gas flow flows; and an outlet downstream of the contractor to provide the gas flow to the two parallel plates.

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