| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a foreign material detector for detecting a foreign material on a base plate installed at the vicinity of a ferrule, which prevents degradation of the detection accuracy due to air stream or the like. <P>SOLUTION: A coating applicator which moves relative to a sheet-like base plate to scan the base plate and discharges a coating liquid on a surface of the base plate is provided with at least a detector which is arranged upstream in the scanning direction of a discharge device of the coating liquid and detects a foreign material on the base plate. The detector comprises a light projection device for irradiation of laser light in parallel with the surface of the base plate, a photoreceiver for receiving the projected laser light, and a device for shielding at least an air stream immediately below the light projection region. <P>COPYRIGHT: (C)2012,JPO&INPIT |
