| 摘要 |
<p>PURPOSE: A method for transferring micro circuits and an apparatus thereof are provided to transfer a final substrate with a plurality of micro circuits formed on a microcircuit substrate having a micro interval using different pitches and patterns at once. CONSTITUTION: A first UV light irradiation module(120) is arranged on a lower portion of a microcircuit substrate carriage(110). UV light generated from the first UV light irradiation module is irradiated onto a first UV film(B1). A pickup roll(140) is arranged on the top of the microcircuit substrate carriage while being separated at a certain interval. An UV film supply roll(150) is placed at a rear portion of the pickup roll. An UV film discharge roll(160) is placed at a front portion of the pickup roll.</p> |
