发明名称 |
ELECTRON BEAM DATA STORAGE SYSTEM AND METHOD FOR HIGH VOLUME MANUFACTURING |
摘要 |
The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.
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申请公布号 |
US2012237877(A1) |
申请公布日期 |
2012.09.20 |
申请号 |
US201113049123 |
申请日期 |
2011.03.16 |
申请人 |
WANG HUNG-CHUN;CHEN PEI-SHIANG;LIN TZU-CHIN;KRECINIC FARUK;CHEN JENG-HORNG;HUANG WEN-CHUN;LIU RU-GUN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
WANG HUNG-CHUN;CHEN PEI-SHIANG;LIN TZU-CHIN;KRECINIC FARUK;CHEN JENG-HORNG;HUANG WEN-CHUN;LIU RU-GUN |
分类号 |
G03F7/20;G06F17/50 |
主分类号 |
G03F7/20 |
代理机构 |
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