| 摘要 |
The present invention relates to a method and a device for determining a deformation of a disc-shaped workpiece, in particular a mould wafer. The device comprises a rotatable, height and laterally adjustable mounting unit for mounting an inner region of the disc-shaped workpiece; a determination unit for determining eccentricity of a centre axis of the disc-shaped workpiece from a centre axis of the mounting unit and for generating a suitable adjustment signal for the mounting unit; a deposit unit for depositing the disc-shaped workpiece during a process of lateral adjustment of the mounting unit; and a fixed-height detector unit for measuring a deviation of a plurality of measuring points, respectively, in a non-mounted outer region of the disc-shaped workpiece from a predetermined height position corresponding to the deformation by rotating the mounting unit or the detector unit at a predetermined height position of the mounting unit. |
