发明名称 |
OPTICAL MICROSCOPE, AND SPECTROSCOPIC MEASUREMENT METHOD |
摘要 |
<p>Provided are an optical microscope and a spectroscopic measurement method which enable high-resolution measurements to be made. A spectrometer in one embodiment of the present invention is provided with: a laser light source (10); an objective lens (21) that concentrates a light beam, and causes the light beam to strike a sample (22); a Y-scanner (13) that scans the spot position of the light beam on the sample (22); a beam splitter (17) that splits the emitted light emitted from the sample (22) to the objective lens (21) side, said emitted light having a different wavelength than the rest of the light beam that struck the sample (22), and the light beam from the light source (10) that strikes the sample; a spectroscope (31) that spatially disperses the emitted light split by the beam splitter (17) according to the wavelength; a detector (32) that detects the emitted light dispersed by the spectroscope (31); and a pinhole array (30) that is positioned on the incident side of the spectroscope (31), and upon which a plurality of pinholes (42), which allows the emitted light to pass through on the spectroscope (31) side, is disposed.</p> |
申请公布号 |
WO2012124303(A1) |
申请公布日期 |
2012.09.20 |
申请号 |
WO2012JP01664 |
申请日期 |
2012.03.09 |
申请人 |
NANOPHOTON CORPORATION;KAWATA, SATOSHI;KOBAYASHI, MINORU;OTA, TAISUKE |
发明人 |
KAWATA, SATOSHI;KOBAYASHI, MINORU;OTA, TAISUKE |
分类号 |
G02B21/00;G01J3/44;G01N21/65 |
主分类号 |
G02B21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|