发明名称 OPTICAL MICROSCOPE, AND SPECTROSCOPIC MEASUREMENT METHOD
摘要 <p>Provided are an optical microscope and a spectroscopic measurement method which enable high-resolution measurements to be made. A spectrometer in one embodiment of the present invention is provided with: a laser light source (10); an objective lens (21) that concentrates a light beam, and causes the light beam to strike a sample (22); a Y-scanner (13) that scans the spot position of the light beam on the sample (22); a beam splitter (17) that splits the emitted light emitted from the sample (22) to the objective lens (21) side, said emitted light having a different wavelength than the rest of the light beam that struck the sample (22), and the light beam from the light source (10) that strikes the sample; a spectroscope (31) that spatially disperses the emitted light split by the beam splitter (17) according to the wavelength; a detector (32) that detects the emitted light dispersed by the spectroscope (31); and a pinhole array (30) that is positioned on the incident side of the spectroscope (31), and upon which a plurality of pinholes (42), which allows the emitted light to pass through on the spectroscope (31) side, is disposed.</p>
申请公布号 WO2012124303(A1) 申请公布日期 2012.09.20
申请号 WO2012JP01664 申请日期 2012.03.09
申请人 NANOPHOTON CORPORATION;KAWATA, SATOSHI;KOBAYASHI, MINORU;OTA, TAISUKE 发明人 KAWATA, SATOSHI;KOBAYASHI, MINORU;OTA, TAISUKE
分类号 G02B21/00;G01J3/44;G01N21/65 主分类号 G02B21/00
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