| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cryopump for providing a high pumping speed of Type III gases. <P>SOLUTION: An open configuration of a frontal cryopanel array provides high conductance of gases into a radiation shield which is shaped to focus the gases toward a second stage array. The second stage array has an open configuration of baffles coated with an adsorbent. Substantially, all of the adsorbent has a direct line of sight to the radiation shield or to an opening in the radiation shield, and substantially, all of the baffles is coated with the absorbent. In one embodiment, a second stage cryopanel has an array of discs fanned to define a generally ball shaped envelope. <P>COPYRIGHT: (C)2012,JPO&INPIT |
