ALIGNMENT DEVICE AND EXPOSURE DEVICE PROVIDED WITH SAME

摘要

[Problem] To provide an alignment means that maintains alignment accuracy with a bottom layer of a printed board with multiple layers for use in an electronic circuit, and which enables adjustment of the alignment of an electronic component mounted on the surface of the printed board. [Solution] An alignment device comprises a storage section (82) that stores design coordinate positions (MC) at which alignment marks (AM) should be formed on a substrate (PB), a measuring section (70) that measures the coordinate positions of the alignment marks transferred to the substrate, and a calculation section (84) that calculates target coordinate positions (TG) which are the coordinate positions of the alignment marks measured by the measuring section that are moved by a prescribed distance only to the design coordinate positions.