METHOD FOR DEPOSITION OF ELECTRIC INSULATING LAYERS

摘要

FIELD: electricity. ^ SUBSTANCE: between at least one anode and cathode of arc source in reactive gas atmosphere a steady electrical arc discharge is realised upon application of mostly perpendicular external magnetic field with vertical component Bz set in the range 3-50 g.wt. to the target surface and the magnetic field has radial component Br relative to the mentioned target surface, it is less as compared to component Bz. Excitation current is supplied at least to one usually axially polarised coil with geometry similar to the target periphery. ^ EFFECT: improving efficiency of the method. ^ 24 cl, 6 dwg, 1 ex