发明名称 LIGHT IRRADIATION APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a light irradiation apparatus that can determine an anomalous discharge lamp by detecting a change in illuminance distribution and can maintain illuminance uniformity upon such a change in illuminance distribution. <P>SOLUTION: The light irradiation apparatus having a light irradiation section 1 for simultaneously lighting an array of light source elements 21 each comprising a discharge lamp and a reflector to irradiate a light irradiation region with light from the light source elements 21 includes diffusion means 55 for diffusely radiating the light from the light source elements 21, and includes a light sensor 60 for detecting a light quantity distribution of diffusely scattered light reflected by the diffusion means 55. A signal detected by the light sensor 60 is fed into an image processing unit 7, and the image processing unit 7 converts an illuminance distribution on the diffusion means 55 to an illuminance distribution in the light irradiation region, and displays it on a display section or the like. When the illuminance by a specific lamp lowers, the low illuminance lamp is identified and an alarm is output, and power supplied to the lamp is increased to compensate for the change in light quantity distribution. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012182281(A) 申请公布日期 2012.09.20
申请号 JP20110043804 申请日期 2011.03.01
申请人 USHIO INC 发明人 NAKADA SHIGENORI
分类号 H01L21/027;F21S2/00;F21Y101/02;G03F7/20 主分类号 H01L21/027
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