| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro-hole inspection device and method capable of detecting not only the position of a micro-hole in an object to be inspected but also the size thereof. <P>SOLUTION: An audible sound generator 1 is arranged at one side of an inspection area A1 of an object to be inspected A, a pair of microphones 2 and 3 for measuring sound pressure is made to two-dimensionally scan at the other side to respectively acquire an output signal, acoustic intensity is measured on the acquired output signal to detect the position of a micro-hole (a) of the inspection area A1, and furthermore, the inclination of the measured acoustic intensity is calculated to detect the size of the micro-hole (a) on the basis of the magnitude of the inclination. <P>COPYRIGHT: (C)2012,JPO&INPIT |
