DEPOSITION APPARATUS HAVING LIGHT IRRADIATION PORTION FOR REMOVING FOREIGN SUBSTANCE

摘要

The present invention relates to a deposition apparatus having a light irradiation portion for removing foreign substances, the deposition apparatus having the light irradiation portion for removing foreign substances of the present invention comprising: a chamber portion for accommodating a substrate therein so that a source is deposited on the substrate; the light irradiation portion for irradiating ultraviolet light toward the substrate; a window, which is made from a light transmitting material and arranged between the light irradiation portion and the substrate, for transmitting the ultraviolet light that is generated from the light irradiation portion into the chamber portion; and a light transmitting portion, which is inside the chamber portion and comprises a heating member, for eliminating foreign substances that inhibit the transmission of the ultraviolet light through the window, by means of generating heat.