发明名称 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD OF NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 According to one embodiment, a memory cell includes a resistance change layer, an upper electrode layer, a lower electrode layer, a diode layer, a first oxide film, and a second oxide film. The upper electrode layer is arranged above the resistance change layer. The lower electrode layer is arranged below the resistance change layer. The diode layer is arranged above the upper electrode layer or below the lower electrode layer. The first oxide film exists on a side wall of at least one electrode layer of the upper electrode layer or the lower electrode layer. The second oxide film exists on a side wall of the diode layer. The film thickness of the first oxide film is thicker than a film thickness of the second oxide film.
申请公布号 US2012235109(A1) 申请公布日期 2012.09.20
申请号 US201113334848 申请日期 2011.12.22
申请人 NOJIRI YASUHIRO;KABUSHIKI KAISHA TOSHIBA 发明人 NOJIRI YASUHIRO
分类号 H01L45/00;H01L21/62 主分类号 H01L45/00
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