Monolithically applied heating elements on saw substrate

摘要

A surface acoustic wave (SAW) device comprising a piezoelectric substrate having a working surface with an active zone capable of propagating an acoustic wave on said working surface; at least one interdigital transducer on the working surface, having interdigital fingers aligned in the active zone for inducing or receiving surface acoustic waves in the active zone; and a heating element on the working surface; wherein the transducer, heating element and preferably a temperature sensor are monolithically formed on the substrate.