| 摘要 |
<p>Each of a washing device (40), a developing device (44), an etching device (45) and a resist stripping device (46), which are devices for producing an array substrate (20) for a liquid crystal panel (11), comprises a roller conveyer (a conveying section) (50) which conveys a glass substrate (a substrate for a display panel) (GS) that serves as the array substrate (20), a nozzle (a treatment solution feeding section) (51) which feeds a treatment solution (L) onto the surface of the glass substrate (GS) that is conveyed by the roller conveyer (50), and an ultrasonic wave application section (56) which applies ultrasonic vibrations to the roller conveyer (50).</p> |
