| 摘要 |
<p>A foreign substance removal apparatus detects how large difference is generated between a time phase of a vibration detected when a bending vibration of an m-order vibration mode is excited at an optical low-pass filter (410), and a time phase of a vibration detected when a bending vibration of an (m+1)-order vibration mode is excited at the optical low-pass filter (410). Then, the foreign substance removal apparatus calculates main driving parameters for use in a main driving operation based on the detected time phase difference.</p> |
