| 摘要 |
A magnetic sensor simply is configured so as to magnetically measure not only conductive materials but also nonconductive materials over a wide temperature range and which offers high performance and high reliability, as well as a scanning microscope that uses the magnetic sensor. A scanning microscope according to the present invention includes a magnetic sensor with a magnetic sensing element provided at a free end of a cantilever-like flexible member and a strain gauge installed on the flexible member, driving means for driving the flexible member or a measurement sample, and control means for controlling driving provided by the driving means based on an output signal from the strain gauge. |
