发明名称 |
METHOD FOR PRODUCING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP |
摘要 |
A method for producing at least one deformable membrane micropump including a first substrate and a second substrate assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity. In the method: the cavity is produced in the first substrate; then the first and second substrates are assembled together; then the deformable membrane is produced in the second substrate. |
申请公布号 |
EP2499368(A2) |
申请公布日期 |
2012.09.19 |
申请号 |
EP20100781481 |
申请日期 |
2010.11.12 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
FOUILLET, YVES;BALERAS, FRANÇOIS;COCHET, MARTINE;MAUBERT, SANDRINE |
分类号 |
F04B43/04;B81B1/00;B81B3/00;B81C1/00;F04D33/00 |
主分类号 |
F04B43/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|