发明名称 PROCESS FOR PRODUCING A QUARTZ GLASS CYLINDER AND ALSO SUPPORT FOR CARRYING OUT THE PROCESS
摘要 <p>In a known process for producing a quartz glass cylinder, a porous soot tube, which is sintered to form the quartz glass cylinder, is produced by depositing SiO2 particles on an outer cylindrical surface of a support, which rotates about the longitudinal axis thereof and has a layer of silicon carbide (SiC layer). In order on this basis to specify a support having a high resistance to fracture, which firstly can easily be removed and which secondly presents a low risk of contamination for the soot body, the invention proposes that the SiC layer is treated at a high temperature in an oxygen-containing atmosphere before the SiO2 particles are deposited, in such a manner that an SiO2 protective layer having a thickness of at least 0.1μm is produced by oxidation.</p>
申请公布号 EP2499102(A1) 申请公布日期 2012.09.19
申请号 EP20100752815 申请日期 2010.09.14
申请人 HERAEUS QUARZGLAS GMBH & CO. KG 发明人 SCHUSTER, ANKE;SOWA, RENE;TROMMER, MARTIN;PEPER, UDO
分类号 C03B19/14;C03B37/014 主分类号 C03B19/14
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