发明名称 |
FILTERING APPARATUS FOR MANUFACTURING SINGLE CRYSTAL INGOT AND SINGLE CRYSTAL INGOT GROWER INCLUDING THE SAME |
摘要 |
PURPOSE: A filtering device for a single crystal growing device and the single crystal growing device including the filtering device are provided to prevent filter inside etching caused by oxide as the inside of a filter is formed with an acid-resistant material. CONSTITUTION: A body unit(310) includes a filter for air flowing from a chamber. A cover unit(330) is placed on an upper side of the body unit. The body unit includes a high temperature corrosion resistance material. A combining device(340) is placed on a lower part of the filter.
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申请公布号 |
KR20120103173(A) |
申请公布日期 |
2012.09.19 |
申请号 |
KR20110021279 |
申请日期 |
2011.03.10 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
CHOI, YOUNG KYU;KIM, SE HUN;CHO, HWA JIN;KIM, JUNG RYUL |
分类号 |
C30B15/00;B01D46/00;C30B29/06 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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