发明名称 TESTING APPARATUS OF COOLING LINE
摘要 PURPOSE: A cooling test apparatus is provided to selectively test the leakage or clogging of a cooling line through various combination of an on-off valve. CONSTITUTION: A test solution storage is arranged on an inner floor side of a housing. A cooling unit cools a test solution discharged from a pump and discharges a frozen test solution to a cooling device(300) through an outlet(113). A measuring unit measures a flow rate of the test solution flowing from the cooling device through an inlet port(114). A first on-off valve controls the opening and shutting of an outlet. A second on-off valve controls the opening and shutting of the inlet port. A third on-off valve controls the opening and shutting of a connection pipe.
申请公布号 KR101182101(B1) 申请公布日期 2012.09.19
申请号 KR20120023016 申请日期 2012.03.06
申请人 LEE, KYU BAEG 发明人 LEE, KYU BAEG
分类号 H01L21/66;H01L21/02 主分类号 H01L21/66
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