| 发明名称 |
GRAPHOEPITAXIAL SELF-ASSEMBLY OF ARRAYS OF HALF-CYLINDERS FORMED ON A SUBSTRATE |
| 摘要 |
<p>Methods for fabricating sublithographic, nanoscale microstructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.</p> |
| 申请公布号 |
EP2276690(B1) |
申请公布日期 |
2012.09.19 |
| 申请号 |
EP20090739437 |
申请日期 |
2009.04.20 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
MILLWARD, DAN, B.;WESTMORELAND, DONALD |
| 分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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