| 摘要 |
PURPOSE: An inertia sensor is provided to improve the measurement sensitivity of acceleration by using an excitation electrode as well as a sensing electrode. CONSTITUTION: A driving body is supported in a floating state to enable the displacement of a flexible substrate(110). A displacement detecting unit detects the displacement of the driving unit by forming sensing electrodes(111a,111a',111b,111b'). An excitation unit excites the driving unit by forming excitation electrodes(112a,112a',112b,112b'). A differential amplifier connects the sensing electrodes with the excitation electrodes. A circuit calculates angular speed and acceleration through the differential amplifier. |
