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发明名称
摘要
申请公布号
JP5030774(B2)
申请公布日期
2012.09.19
申请号
JP20070518088
申请日期
2005.06.02
申请人
发明人
分类号
H01L29/78;H01L21/336;H01L29/165
主分类号
H01L29/78
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