SYSTEM AND METHOD FOR HANDLING MULTIPLE WORKPIECES FOR MATRIX CONFIGURATION PROCESSING
摘要
<p>A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell.</p>
申请公布号
EP2499666(A2)
申请公布日期
2012.09.19
申请号
EP20100787598
申请日期
2010.11.09
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
发明人
WEAVER, WILLIAM, T.;CARRERA, JAMIE, A.;VOPAT, ROBERT, B.;WEBB, AARON;CARLSON, CHARLES, T.