发明名称 |
ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF |
摘要 |
<p>The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): A-Bn(1) where A is a fused aromatic ring and B has a structure (2), where R1 is C1-C4alkyl and R2 is C1-C4alkyl. The invention further relates to a process for forming an image using the composition.</p> |
申请公布号 |
KR20120102646(A) |
申请公布日期 |
2012.09.18 |
申请号 |
KR20127013194 |
申请日期 |
2010.12.23 |
申请人 |
AZ ELECTRONIC MATERIALS USA CORP. |
发明人 |
RAHMAN M. DALIL;MCKENZIE DOUGLAS;YAO HUIRONG;CHO, JOON YEON;YI YI;LIN GUANYANG |
分类号 |
C09D165/00;C08K5/13;G03F7/09;H01L21/027 |
主分类号 |
C09D165/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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