发明名称 Post passivation metal scheme for high-performance integrated circuit devices
摘要 A new post-passivation metal interconnect scheme is provided over the surface of a IC device that has been covered with a conventional layer of passivation. The metal scheme of the invention comprises, overlying a conventional layer of passivation, thick and wide metal lines in combination with thick layers of dielectric and bond pads. The interconnect system of the invention can be used for the distribution of power, ground, signal and clock lines from bond pads to circuits of a device that are provided in any location of the IC device without introducing significant power drop. No, or smaller ESD circuits are required due to the low impedance post-passivation interconnection, since any accumulated electrostatic discharge will be evenly distributed across all junction capacitance of the circuits on the chip. The post passivation metal scheme is connected to external circuits through bond pads, solder bonding, TAB bonding and the like. A top layer of the interconnect metal scheme is formed using a composite metal for purposes of wirebonding, the composite metal is created over a bulk conduction metal. A diffusion metal may be applied between the bulk metal and the composite metal, in addition a layer of Under-Barrier-Metal (UBM) may be required underneath the bulk conduction metal.
申请公布号 USRE43674(E1) 申请公布日期 2012.09.18
申请号 US20060518595 申请日期 2006.09.08
申请人 LIN MOU-SHIUNG;LEE JIN-YUAN;LEI MING-TA;HUANG CHING-CHENG;MEGICA CORPORATION 发明人 LIN MOU-SHIUNG;LEE JIN-YUAN;LEI MING-TA;HUANG CHING-CHENG
分类号 H01L21/4763;H01L23/48 主分类号 H01L21/4763
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