| 摘要 |
A device for calibrating a wavefront measuring system (WMS) includes a computer generated hologram (CGH) disposed in an axial path of light traveling to or from the WMS, and an imaging lens disposed in the axial path between the WMS and the CGH. An entrance port of the WMS is configured to form a pupil image of a device under test, where a center of curvature (CoC) of the device under test is located along the axial path between the pupil image and the device under test. The CGH is located along the axial path at the CoC, when the imaging lens is inserted between the CoC and the WMS. |
