发明名称 NITROGEN GAS EJECTION APPARATUS WITH MIXING DERIVATIVE
摘要 PURPOSE: A nitrogen gas ejector device with a mixing derivate is provided to smoothly mix sprayed nitrogen gas by temporarily changing the flow of byproduct gas using the mixing derivates. CONSTITUTION: A connection pipe(110) is connected to a transfer pipe by a flange(111). A mixing derivative(120) is installed in the center of the inner space of the connection pipe and has a hollow body with a penetration hole(122). A high pressure spray nozzle(130) sprays nitrogen gas with high pressure to the mixing derivative. A nitrogen gas heater previously heats supplied nitrogen gas.
申请公布号 KR20120102393(A) 申请公布日期 2012.09.18
申请号 KR20110020530 申请日期 2011.03.08
申请人 J-SOLUTION CO., LTD. 发明人 LEE, SEUNG YONG
分类号 H01L21/02 主分类号 H01L21/02
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