HOLDER FOR CERAMIC SUBSTRATE AND METHOD FOR PRODUCING CERAMIC MEMBER

摘要

PURPOSE: A ceramic base material supporting device, a manufacturing method thereof, and ceramic materials are provided to leave supporting material films(SiC film) in a ceramic base material(SiC coating graphite material). CONSTITUTION: The ceramic base material supporting device(11) supports a ceramic base material(15) located at the front end part(13). The ceramic base material supporting device forms a ceramic member film(17) within a furnace in order to be used for manufacturing the ceramic members(19). The ceramic base material supporting device has a core material(21) and a supporting film(25). The core materials include graphite. The supporting device film includes a pyrolytic carbon layer(23) on the surface which includes the front end part. A manufacturing method of the ceramic member using the ceramic base material supporting device comprises the following steps: preparing the ceramic base material supporting device; supporting the ceramic base material by using the front end part; forming the ceramic member film in the ceramic base material; and separating the ceramic base material supporting device from the ceramic base material.