发明名称 Methods and apparatus to reduce layout based strain variations in non-planar transistor structures
摘要 The present disclosure relates to the field of fabricating microelectronic devices. In at least one embodiment, the present disclosure relates to forming isolation structures in strained semiconductor bodies of non-planar transistors while maintaining strain in the semiconductor bodies.
申请公布号 US8269283(B2) 申请公布日期 2012.09.18
申请号 US20090653971 申请日期 2009.12.21
申请人 CEA STEPHEN M.;GILES MARTIN D.;KUHN KELIN;KAVALIEROS JACK T.;KUHN MARKUS;INTEL CORPORATION 发明人 CEA STEPHEN M.;GILES MARTIN D.;KUHN KELIN;KAVALIEROS JACK T.;KUHN MARKUS
分类号 H01L21/70 主分类号 H01L21/70
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