发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to simultaneously form a resistance element in which film thickness is thin and a capacitive element in which the film thickness is thick by the level difference of an element isolation region. CONSTITUTION: An element isolation region(2) is formed on a semiconductor substrate(1). A source region and a drain region(5) are formed on the semiconductor substrate by diffusing impurities of a second conductive type of high concentration within a well region(4). A gate electrode(7) is formed on the surface of the semiconductor substrate in which the source region and the drain region are formed through a gate oxidation film(6). A top electrode(10) is formed on a bottom electrode through a capacity insulating film(9). A resistance unit(11) is formed on the element isolation region. |
申请公布号 |
KR20120102541(A) |
申请公布日期 |
2012.09.18 |
申请号 |
KR20120023438 |
申请日期 |
2012.03.07 |
申请人 |
SEIKO INSTRU KABUSHIKI KAISHA, ALSO TRADING AS SEIKO INSTRUMENTS INC. |
发明人 |
INOUE AYAKO;TSUMURA KAZUHIRO |
分类号 |
H01L21/77;H01L27/00 |
主分类号 |
H01L21/77 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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