发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to simultaneously form a resistance element in which film thickness is thin and a capacitive element in which the film thickness is thick by the level difference of an element isolation region. CONSTITUTION: An element isolation region(2) is formed on a semiconductor substrate(1). A source region and a drain region(5) are formed on the semiconductor substrate by diffusing impurities of a second conductive type of high concentration within a well region(4). A gate electrode(7) is formed on the surface of the semiconductor substrate in which the source region and the drain region are formed through a gate oxidation film(6). A top electrode(10) is formed on a bottom electrode through a capacity insulating film(9). A resistance unit(11) is formed on the element isolation region.
申请公布号 KR20120102541(A) 申请公布日期 2012.09.18
申请号 KR20120023438 申请日期 2012.03.07
申请人 SEIKO INSTRU KABUSHIKI KAISHA, ALSO TRADING AS SEIKO INSTRUMENTS INC. 发明人 INOUE AYAKO;TSUMURA KAZUHIRO
分类号 H01L21/77;H01L27/00 主分类号 H01L21/77
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