发明名称 |
Apparatus for measuring dielectric properties of parts |
摘要 |
A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
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申请公布号 |
US8269510(B2) |
申请公布日期 |
2012.09.18 |
申请号 |
US20080240291 |
申请日期 |
2008.09.29 |
申请人 |
KIM JAEHYUN;SATO ARTHUR H.;COMENDANT KEITH;LIU QING;WU FEIYANG;LAM RESEARCH CORPORATION |
发明人 |
KIM JAEHYUN;SATO ARTHUR H.;COMENDANT KEITH;LIU QING;WU FEIYANG |
分类号 |
G01R27/26 |
主分类号 |
G01R27/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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