SUBSTRATE CONVEYING METHOD, RECORDING MEDIUM IN WHICH PROGRAM IS RECORDED FOR CAUSING SUBSTRATE CONVEYING METHOD TO BE EXECUTED AND SUBSTRATE CONVEYOR

摘要

PURPOSE: A substrate transfer method, a recording medium with a program for performing the substrate transfer method, a substrate transfer apparatus are provided to reduce time of transferring a laminate from a substrate holding and supporting unit. CONSTITUTION: A loading stand(12) is installed in the front side of a housing(18). The housing includes a loading area(20) and a film forming container(40). A base plate(19) is installed between the loading area and the film forming container. A shutter device(22) is installed on the upper side of the loading area.