| 发明名称 |
LIGHT-SENSITIVE POLYMER COMPOSITION, METHOD FOR PRODUCING PATTERN, AND ELECTRONIC COMPONENT |
| 摘要 |
<p>Disclosed is a light-sensitive polymer composition comprising (a) a polymer that is soluble in an aqueous alkaline solution, (b) a compound that generates acid by means of light, (c) an aluminum-complex bonding-assisting agent, and (d) a crosslinking agent having a group represented by -CH2OR (R being a hydrogen atom or a monovalent organic group).</p> |
| 申请公布号 |
KR20120102124(A) |
申请公布日期 |
2012.09.17 |
| 申请号 |
KR20127018651 |
申请日期 |
2011.01.19 |
| 申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. |
发明人 |
ONO KEISHI;MINEGISHI TOMONORI;OOE MASAYUKI;KOTANI MASASHI;KONNO TAKU |
| 分类号 |
G03F7/085;G03F7/004;G03F7/023;H01L21/027 |
主分类号 |
G03F7/085 |
| 代理机构 |
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| 主权项 |
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