TRAY, TRAY SUPPORT MEMBER, AND VACUUM PROCESSING APPARATUS,申请号KR20100013551-传众专利搜索

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发明名称	TRAY, TRAY SUPPORT MEMBER, AND VACUUM PROCESSING APPARATUS
摘要
申请公布号	KR101183717(B1)	申请公布日期	2012.09.17
申请号	KR20100013551	申请日期	2010.02.12
申请人		发明人
分类号	H01L21/68;H01L21/02;H01L21/683	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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