Manufacturing method of plasma resistant member,申请号KR20100037282-传众专利搜索

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发明名称	Manufacturing method of plasma resistant member
摘要
申请公布号	KR101183021(B1)	申请公布日期	2012.09.14
申请号	KR20100037282	申请日期	2010.04.22
申请人		发明人
分类号	C23C24/08;H01L21/02;H01L21/205	主分类号	C23C24/08
代理机构		代理人
主权项
地址

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