发明名称 |
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS |
摘要 |
<p>The lighting device has a depolarizer (10) causes a linear polarized light in connection with a light mixture system following light direction of propagation in an effective depolarization on the depolarizer. A micro lens array (20) is arranged in light direction of propagation before the light mixture system, where multiple micro lenses (20a to 20e) are arranged with a periodicity. The depolarizer is formed in such a manner that by reciprocal effect of the depolarizer with the periodicity of the micro lens array results in remainder polarization distribution to a maximum polarization degree. Independent claims are also included for the following: (1) a method for micro lithographic production of micro-structured element (2) a micro-structured element.</p> |
申请公布号 |
KR20120101738(A) |
申请公布日期 |
2012.09.14 |
申请号 |
KR20127022527 |
申请日期 |
2007.10.01 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
FIOLKA DAMIAN;MAUL MANFRED;SCHWAB MARKUS;SEITZ WOLFGANG;DITTMANN OLAF |
分类号 |
G02B27/18;G02B27/28;G03F7/20 |
主分类号 |
G02B27/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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