| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cylindrical target allowing firm joining between a cylindrical base material and/or a target material and a solder material to increase conductivity and thermal conductivity between them and remarkably reducing cracking and peeling of the target material in use. <P>SOLUTION: In a method of manufacturing the cylindrical target, when the cylindrical base material is arranged concentrically with the cylindrical target, and molten solder is injected into a space between the cylindrical base material and the cylindrical target material to join them together while heating them to above the melting point of the solder material, a powder substance (a ferromagnetic material, a ceramic material and the like) which is lighter in specific gravity than the solder material is put in advance into the space, then the molten solder is injected to float the powder substance on the liquid surface of the solder material, and the solder material is injected while vibrating the powder substance, and the solder material is physically agitated to manufacture the cylindrical target. <P>COPYRIGHT: (C)2012,JPO&INPIT |
