CARBON NANOTUBE FORMING METHOD, PRE-TREATMENT METHOD THEREFOR, ELECTRON EMITTER, AND LIGHTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for forming carbon nanotubes which are oriented in a nearly vertical state on a substrate and have high density, at a temperature as low as possible.

SOLUTION: The carbon nanotube forming method includes: a step of forming catalytic metal fine particles of which the surfaces are oxidized by the action of oxygen plasma on a catalytic metal layer at a temperature T1(STEP 1); a step of reducing and activating the surfaces of the catalytic metal fine particles by the action of hydrogen plasma on the catalytic metal fine particles at a temperature T2higher than the temperature T1(STEP 2); and a step of growing the carbon nanotubes on the activated catalytic metal fine particles by plasma CVD at a temperature T3(STEP 3).

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