| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck which concurrently satisfies tight adhesiveness of an inner electrode layer and a high-purity alumina layer and conductivity of the inner electrode layer, the electrostatic chuck being a Coulomb force type electrostatic chuck comprising an electrode inside a dielectric comprised of high-purity alumina. <P>SOLUTION: According to a method of manufacturing an electrostatic chuck including forming a laminate by laminating sheet-like alumina molded bodies via an inner electrode layer and calcinating such a laminate, the inner electrode layer in which alumina is added as a coexistent material to Pd powder is used to apply HIP treatment after calcination. <P>COPYRIGHT: (C)2012,JPO&INPIT |
