The invention relates to passivation layers based on aluminium oxide, said layers acting simultaneously as diffusion barriers for aluminium and other metals in relation to wafer layers lying below. The invention also relates to a method and suitable compositions for producing said layers.
申请公布号
WO2012119684(A2)
申请公布日期
2012.09.13
申请号
WO2012EP00590
申请日期
2012.02.09
申请人
MERCK PATENT GMBH;KOEHLER, INGO;DOLL, OLIVER;STOCKUM, WERNER;BARTH, SEBASTIAN
发明人
KOEHLER, INGO;DOLL, OLIVER;STOCKUM, WERNER;BARTH, SEBASTIAN